Testing Solutions for Power Semiconductors

Diversifying Evaluation Needs for Power Semiconductors (SiC/GaN) and Kikusui Electronics’ Integrated Solutions

In recent years, the growing demand for energy efficiency, the proliferation of EVs and renewable energy, along with the increase in high-power requirements in AI and data centers, have made power semiconductor evaluation more diverse and complex than ever before.
Power modules that incorporate next-generation materials such as SiC and GaN, including

high-voltage, high-current, and high-speed switching characteristics,
as well as reliability evaluations under high/low temperatures,

now face increasingly complex and precise testing demands.

However, we often hear comments such as,

“Each test requires preparation, which slows down the development,”
and, “As multi-device systems move toward higher currents, conventional multi-channel power supplies can no longer provide enough current.”

Such voices are often heard.
At Kikusui Electronics Corporation, we offer integrated solutions combining power supplies, electronic loads, and testing equipment to address these on-site challenges. We would like to introduce how these issues can be solved using our devices.

VMCB: Supports Control of Multiple and Individual Units

Are you struggling with complicated settings and configuration errors
while testing with multi-channel power supplies?

During conventional testing, each instrument operates independently, making synchronization and data logging complicated.
When re-evaluating or handing off the setup to another team, it’s often difficult to trace who measured what and how.

VMCB (Virtual Multi Channel Bus) is a technology that allows multiple DC power supplies to be networked via LAN and centrally operated and managed using a PC. It virtually groups DC power supplies, enabling efficient 1-to-N, N-to-M, and even large-scale network-based remote control and monitoring.

With SCPI commands, Kikusui DC power supplies and other SCPI-compatible measuring instruments can be linked and controlled, enabling easy and flexible evaluation system configuration.

An Example of Using the VMBC for Synchronized and Independent Control of Multiple Systems.

Key benefits of VMBC:

You can set output ON/OFF sequences and timing offsets in units of a few to several tens of milliseconds.
Automatic log acquisition enables recording of ON/OFF history and operation logs, which are useful for troubleshooting.
No need for special drivers or software. It can be used even when the PC or system setup changes.

Example of High-Precision Timing Control

Output voltage can be controlled via the analog J1 terminal using an external voltage of 0-2.5 V.

Adjustable voltage with minimal delay between master and slave units

Equipped with CC Priority Mode

Have you ever experienced a moment of panic during reliability testing or constant-current testing
caused by a power supply’s “current overshoot”?

Conventional CV priority operation poses the risk of device damage or test failure due to transient overshoot.

The PWR-01 and PWX series have a CC priority mode, which is useful during semiconductor aging tests, such as power cycle testing. This mode suppresses output current overshoot during constant current startup (when the OUTPUT is ON).

Differences in Output Current Waveforms for Different Priority Settings of the PWX Series

Output current rise waveform in CC priority mode

Output current rise waveform in CV priority mode

Test Conditions: Output voltage set to 10V and output current set to 10A, during short-circuit operation.
Model Name: PWR1201L

Wide-Range and Broad Operating Area

Compact Wide-Range DC Power Supplies
PWR-01 Series

Rack-Mountable Compact DC Power Supplies

Compact Wide-Range Switching Power Supplies
PWX Series

For Withstanding Voltage Testing of Next-Generation Semiconductors

Have you noticed that the standards for gate drivers
and insulation evaluation are getting stricter?

In the power device industry, as insulation testing becomes more complex, the pressure on testing departments increases. Common challenges include
conducting withstanding voltage (hipot), insulation resistance, and partial discharge tests using separate devices,
and being unable to keep up with frequent standard revisions and the increasing number of test items.
The burden on the testing department is becoming increasingly severe.

The introduction of wide-bandgap semiconductors such as SiC and GaN has significantly enhanced insulation performance and breakdown voltage. In particular, evaluation of SiC materials, semiconductors using SiC, and isolators used in these devices now requires high-voltage hipot testing of 6.5 kV or higher.

Kikusui Electronics’ TOS9311 withstanding voltage and insulation resistance tester supports AC/DC testing up to 10 kV. This model features a rise-time control function allowing for gradual voltage ramp-up, while the trend graph display enables monitoring of output voltage and leakage current. TOS9311 is an excellent choice for the safety evaluation of SiC semiconductor devices, high-voltage inverters, and converters.

AC/DC Withstanding Voltage Testing of up to 10KV

Hipot Tester with Insulation Resistance Test
TOS9311

Voltage Sag Immunity Compliance for Semiconductor Manufacturing Equipment Specified by the SEMI F47-0706 Standard

Are you experiencing issues with manufacturing equipment or auxiliary devices
that suddenly shut down during voltage dips or momentary power interruptions?

Momentary voltage drops caused by lightning strikes or system abnormalities.
Even if the main system remains operational, subsystems and voltage relays may malfunction.
By the time you start investigating the cause after a shutdown, the damage is already done.

The semiconductor manufacturing process is highly complex and segmented. It involves using equipment like etching systems, thermal processing equipment, and ion implantation devices.
SEMI F47-0706 defines the power fluctuation test (voltage sag immunity) required for semiconductor manufacturing equipment. This standard is used to verify the equipment’s ability to operate without interruption during voltage sags.

While this is an industry-specific standard rather than a universal one, it has recently become an essential requirement for equipment used by semiconductor manufacturers.
Kikusui Electronics Corporation’s PCR-WEA/WEA2 Series of AC power supplies features adjustable voltage and frequency, enabling simulation of power line disturbances such as voltage sags and momentary power interruptions. It is an excellent choice for conducting SEMI F47-0706 compliance testing.

Since semiconductor manufacturing equipment is used globally, it is essential to evaluate its resistance to input voltage fluctuations under various environmental conditions.

Test Object: Semiconductor manufacturing equipment
Examples: Etching equipment, deposition equipment (CVD & PVD), thermal processing equipment, surface cleaning equipment, ion implantation equipment, etc.